Narrow growth window for stoichiometric, layer-by-layer growth of LaAlO3 thin films using pulsed laser deposition
نویسندگان
چکیده
منابع مشابه
Layer-by-layer Growth for Pulsed Laser Deposition
Pulsed laser deposition (PLD) is a popular growth method, which has been successfully used for fabricating thin films. Compared to continuous deposition (like molecular beam epitaxy) the pulse intensity can be used as an additional parameter for tuning the growth behavior, so that under certain circumstances PLD improves layer-by-layer growth. We present kinetic Monte-Carlo simulations for PLD ...
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ژورنال
عنوان ژورنال: Journal of Crystal Growth
سال: 2016
ISSN: 0022-0248
DOI: 10.1016/j.jcrysgro.2016.03.025